Detection of N-Te bonds in the as-deposited amorphous nitrogen-doped GeTe-based phase change alloys using N K-edge XANES spectroscopy and their impact on crystallization
| Auteurs | Krbal M., Kolobov A.V., Fons P., Mitrofanov K.V., Tamenori Y., Hyot B., Andre B., Tominaga J. |
| Year | 2017-0022 |
| Source-Title | Journal of Alloys and Compounds |
| Affiliations | Faculty of Chemical Technology, Center of Materials and Nanotechnologies (CEMNAT), University of Pardubice, Legions Square 565, Pardubice, Czech Republic, Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology, 1-1-1 Higashi, Tsukuba, Ibaraki, Japan, Japan Synchrotron Radiation Research Institute (JASRI), SPring-8, Mikazuki, Hyogo, Japan, Laboratoire de Technologies pour la Nanophotonique, DOPT, SIONA, CEA Leti-MINATEC, 17 rue des martyrs, Grenoble, France |
| Abstract | Using N K-edge XANES studies, we demonstrate a noticeable difference in local structure around the nitrogen atoms in as-deposited amorphous and annealed N-doped GeTe-based phase change alloys. The pronounced changes appear as a ? 2 eV shift in the absorption edge to higher photon energies and the overall shape of the XANES spectrum. Comparison of the experimental XANES spectrum of the as-deposited amorphous phase with ab-initio XANES simulations discloses that the as-deposited phase mainly consists of the NGe3and the NTe3pyramidal units in approximately equal concentration. When annealed, NTe3units gradually rebond to the NGe3units and at the same time N atoms diffuse through the amorphous phase to form the GexNyaggregates. Upon long-standing annealing at 400?C a compact interlayer of Ge3N4is formed in the crystalline phase. © 2017 Elsevier B.V. |
| Author-Keywords | Local structure, Phase-change memory, X-ray absorption spectroscopy |
| Index-Keywords | Amorphous alloys, Annealing, Doping (additives), Germanium, Nitrogen, X ray absorption near edge structure spectroscopy, X ray absorption spectroscopy, Absorption edges, Amorphous phase, Crystalline phase, Local structure, Nitrogen atom, Nitrogen-doped, Photon energy, XANES spectra, Phase change memory |
| ISSN | 9258388 |
| Lien vers article | Link |