Toward optimized SiOCH films for BTEX detection: Impact of chemical composition on toluene adsorption
| Auteurs | Sabahy J.E., Berthier J., Ricoul F., Jousseaume V. |
| Year | 2018-0061 |
| Source-Title | Sensors and Actuators, B: Chemical |
| Affiliations | Univ. Grenoble Alpes, Grenoble, France, CEA, LETI, MINATEC Campus, Grenoble, France |
| Abstract | Volatile Organic Compounds are a cause of concern for human health. It is particularly the case for BTEX compounds (Benzene, Toluene, Ethylbenzene and Xylenes). Gravimetric sensors are good candidates for their detection but they have to be functionalized by a sensitive film to become active. In this work, organosilicate thin films (SiOCH) deposited by plasma enhanced chemical vapor deposition are investigated. This work aims at understanding the role of their chemical composition on gas adsorption and to propose an optimized material for BTEX detection. Through the synthesis and characterization of various SiOCH thin films, the role of hydrophobicity, carbon content and specific chemical bonding is highlighted. This led to an optimized film presenting both high affinity (partition coefficient toward toluene higher than 15000) and rapid temporal response. © 2017 Elsevier B.V. |
| Author-Keywords | Organosilicate, Partition coefficient, PECVD, Quartz crystal microbalance, SiOCH thin films, VOCs |
| Index-Keywords | Carbon, Carbon films, Chemical bonds, Chemical detection, Deposition, Gas adsorption, Plasma CVD, Plasma enhanced chemical vapor deposition, Quartz crystal microbalances, Silicon compounds, Toluene, Vapor deposition, Volatile organic compounds, Chemical compositions, Gravimetric sensors, Organosilicate thin films, Organosilicates, Partition coefficient, Synthesis and characterizations, Temporal response, Toluene adsorption, Thin films |
| ISSN | 9254005 |
| Lien vers article | Link |