Piezoelectric actuators, next driver for MEMS market?
| Auteurs | Fanget S., Casset F., Nicolas S., Dieppedale C., Allain M., Desloges B., Le Rhun G. |
| Year | 2017-0083 |
| Source-Title | Advanced Materials - TechConnect Briefs 2017 |
| Affiliations | Univ. Grenoble Alpes, CEA, LETI, France |
| Abstract | Over the past three decades, huge progresses have been made in MEMS technologies. Hundreds of millions of MEMS, principally: accelerometers, gyroscopes and microphones, are commercialized yearly. This should continue to increase rapidly with upcoming new applications related to IOT or autonomous cars. These new opportunities could be the trigger for a rapid growth of the MEMS actuators market. To perform micro-actuators, LETI has been developing for more than 25 years a large know-how on piezoelectric thin films: Lead Zirconate Titanate (PZT) and Aluminum Nitride (A1N). Using PZT or A1N thin films deposited by sol-gel method and sputtering respectively on a released silicon membrane, two powerful technological platforms have been developed for a large number of applications. These platforms and some of these applications are presented below. |
| Author-Keywords | MEMS, Microactuators, Piezoelectric thin films |
| Index-Keywords | Actuators, Commerce, Ferroelectric ceramics, MEMS, Microactuators, Piezoelectricity, Semiconducting lead compounds, Sol-gel process, Sol-gels, Technology transfer, Thin films, Autonomous car, Lead zirconate titanate, MEMS actuators, MEMS technology, New applications, Piezoelectric thin films, Silicon membranes, Technological platform, Piezoelectric actuators |
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| Lien vers article | Link |