Comparison of RTN and TDDS methods for trap extraction in trigate nanowires
| Auteurs | Tsiara A., Garros X., Vernhet A., Barraud S., Faynot O., Reimbold G., Tsiara A., Ghibaudo G. |
| Year | 2017-0258 |
| Source-Title | IEEE International Reliability Physics Symposium Proceedings |
| Affiliations | CEA, LETI, MINATEC Campus, 17 rue des Martyrs, Cedex, Grenoble, France, IMEP-LAHC, 3 Parvis Louis Néel, Cedex 1, Grenoble, France |
| Abstract | In this paper we present a direct comparison of the two basic techniques for trap extraction, the Random Telegraph Noise (RTN) and the Time Dependent Defect Spectroscopy (TDDS). By using the method of histograms, extracted from the measured drain current transients, we divided the recorded defects in three different categories. Results show that we night be able to detect traps deeper in the oxide and, also, near the dielectric/channel interface. As we scale down, we found a better correlation between the two methods, while the after stress results show a merging of the slopes compared to the bimodal distribution that appeared at the beginning. © 2017 IEEE. |
| Author-Keywords | nanowires, Random Telegraph Noise-RTN, Time Dependent Defect Spectroscopy-TDDS, traps |
| Index-Keywords | Defects, Drain current, Extraction, Telegraph, Bimodal distribution, Defect spectroscopy, Drain current transient, Random telegraph noise, Scale down, Time dependent, Trap extraction, traps, Nanowires |
| ISSN | 15417026 |
| Lien vers article | Link |