Design considerations for optimization of pull-in stability margin in electrostatic N/MEM relays
| Auteurs | Usai G., Hutin L., Munoz-Gamarra J.L., Ernst T., Vinet M., Feng P.X.-L. |
| Year | 2017-0358 |
| Source-Title | 2017 IEEE International Conference on IC Design and Technology, ICICDT 2017 |
| Affiliations | CEA Leti Minatec Campus, 17 avenue des Martyrs, Grenoble Cedex 9, France, Department of Electrical Engineering and Computer Science, Case School of Engineering, Case Western Reserve University, Cleveland, OH, United States |
| Abstract | This study aims at providing guidelines for designing electrostatically-actuated micro/nanoelectromechanical relays with a broad operating margin around the supply voltage VDD. Whereas it is tempting to focus mainly on minimizing the first pull-in voltage (Vpi) in order to enable a low VDD, special attention should be paid to the so-called catastrophic pull-in (Vcpi), which corresponds to the movable electrode collapsing onto the actuating electrode for a sufficiently large overdrive. Based on analytical and finite element analysis (FEA) modeling, we study the dependence of a functionality margin defined as (Vcpi-Vpi) versus the size and position of the actuating electrode with respect to the movable structure. © 2017 IEEE. |
| Author-Keywords | Analytical, Cantilever beam, IoT, Nanoelectromechanical relay, Pull-in voltage, Ultra-low-power electronics |
| Index-Keywords | Cantilever beams, Electrodes, Electrostatic actuators, Integrated circuits, Analytical, Design considerations, Finite element analysis modeling, Movable electrodes, Nano-electromechanical, Operating margins, Pull-in voltage, Ultra-low-power electronics, Finite element method |
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