CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL
| Auteurs | Ménesguen Y., Boyer B., Rotella H., Lubeck J., Weser J., Beckhoff B., Grötzsch D., Kanngießer B., Novikova A., Nolot E., Lépy M.-C. |
| Year | 2017-0425 |
| Source-Title | X-Ray Spectrometry |
| Affiliations | CEA, LIST, Laboratoire National Henri Becquerel (LNE-LNHB), Gif-sur-Yvette cedex, France, Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, Berlin, Germany, Institut für Optik und Atomare Physik, Technische Universität Berlin, Hardenbergstr. 36, Berlin, Germany, CEA, LETI, MINATEC, 17 rue des Martyrs, Grenoble cedex 9, France |
| Abstract | A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X-ray reflectivity measurements with fluorescence (XRF) acquisitions and especially total reflection X-ray fluorescence-related techniques such as grazing incidence XRF. The instrument was successfully installed and operated on the two branches of the metrology beamline making possible experiments over a wide range of photon energies (45 eV to 40 keV). A heating sample holder was developed to allow the sample temperature to be controlled up to 300° C. Some examples of the first studies are given to illustrate the capabilities of the setup. Copyright © 2017 John Wiley & Sons, Ltd. Copyright © 2017 John Wiley & Sons, Ltd. |
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| ISSN | 498246 |
| Lien vers article | Link |