Toward an accurate quantification in atom probe tomography reconstruction by correlative electron tomography approach on nanoporous materials
| Auteurs | Mouton I., Printemps T., Grenier A., Gambacorti N., Pinna E., Tiddia M., Vacca A., Mula G. |
| Year | 2017-0479 |
| Source-Title | Ultramicroscopy |
| Affiliations | Univ. Grenoble Alpes, F-38000 Grenoble, France, Grenoble, France, Minatec Campus Grenoble France, CEA, LETI, Minatec Campus, Grenoble, France, Dipartimento di Fisica, Università di Cagliari, Cittadella Universitaria, Monserrato (Ca), Italy, Dipartimento di Ingegneria Meccanica, Chimica e dei Materiali, Università degli Studi di Cagliari, Cagliari (Ca), Italy |
| Abstract | In this contribution, we propose a protocol for analysis and accurate reconstruction of nanoporous materials by atom probe tomography (APT). The existence of several holes in porous materials makes both the direct APT analysis and reconstruction almost inaccessible. In the past, a solution has been proposed by filling pores with electron beam-induced deposition. Here, we present an alternative solution using an electro-chemical method allowing to fill even small and dense pores, making APT analysis possible. Concerning the 3D reconstruction, the microstructural features observed by electron tomography are used to finely calibrate the APT reconstruction parameters. © 2017 Elsevier B.V. |
| Author-Keywords | Atom probe tomography, Correlation, Electron tomography, Nanoporous |
| Index-Keywords | Atoms, Correlation methods, Electric impedance tomography, Electrons, Image reconstruction, Microstructural evolution, Nanopores, Plasma interactions, Porous materials, Probes, Accurate quantifications, Atom probe tomography, Electrochemical method, Electron beam-induced deposition, Electron tomography, Microstructural features, Nano-porous, Reconstruction parameters, Chemical analysis, electron tomography, quantitative study |
| ISSN | 3043991 |
| Lien vers article | Link |