Vous êtes ici : Accueil > Investigation of p-contact performance for indium rich InGaN based light emitting diodes and solar cells

Publications

Investigation of p-contact performance for indium rich InGaN based light emitting diodes and solar cells

Publié le 29 mars 2018
Investigation of p-contact performance for indium rich InGaN based light emitting diodes and solar cells
Auteurs
Alam S., Sundaram S., Haas H., Li X., El Gmili Y., Jamroz M.E., Robin I.C., Voss P.L., Salvestrini J.-P., Ougazzaden A.
Year2017-0199
Source-TitlePhysica Status Solidi (A) Applications and Materials Science
Affiliations
School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, United States, Georgia Tech-CNRS, UMI 2958, Metz, France, CEA-LETI, Minatec Campus, Grenoble, France, LMOPS, University of Lorraine, EA4423, Metz, France
Abstract
We report on the optimization of p-GaN layers for high indium (In) content InGaN applications by optimizing temperature, precursor CP2Mg flow rate and III/V ratio and report also on the optimization of p-contact performance. Using MOVPE, a 150 nm thick p-type GaN with moderate Mg doping and a 50 nm contact layer with high Mg doping concentration were grown on standard GaN templates at growth temperatures in the range of 850–1000 °C. Hall measurement yields hole concentration of 4.8 × 1017 cm?3 for the optimized sample. SIMS shows Mg concentration of 1.7 × 1020 cm?3 on average in the heavily doped and 4 × 1019 cm?3 on average in the moderately doped p-GaN layer for the optimized p-GaN. A multilayer Pd/Ag/Ni/Au metal contact has been deposited on this p-GaN and studied using the CTLM technique. Optimization of both p-GaN layers and p-contact processing led to a low resistance contact with specific contact resistivity of 6 × 10?4 ? cm2. We believe, the very high Mg concentration of the surface layer in intimate contact with the contact metal reduces the Schottky barrier height and band bending. This optimization of p-GaN is an important step towards high efficiency green LEDs and solar cells. © 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Author-Keywords
GaN, InGaN, light-emitting diodes, MOVPE, ohmic contacts, solar cells
Index-Keywords
Hole concentration, Indium, Light emitting diodes, Metallorganic vapor phase epitaxy, Ohmic contacts, Palladium, Schottky barrier diodes, Solar cells, Contact layers, Hall measurements, High-efficiency, InGaN, Low-resistance contacts, Mg concentrations, Schottky barrier heights, Specific contact resistivity, Gallium nitride
ISSN18626300
Lien vers articleLink

Go back to list