News
CEA-Leti expands 300 mm line with new contact fabrication capabilities
(c) CEA
Published on 10 December 2020
Body text
- CEA-Leti has added even more new
300 mm equipment this year. The institute's clean rooms can now fabricate their own low-resistance ohmic contacts—a BEOL process where the electrical junctions that link the active components of a circuit to the circuit's connectors are made. This new capability will give even more weight to the R&D services CEA-Leti offers semiconductor-industry partners.
- The new contactor fabrication process took two years to perfect. A set of masks was produced and a stable production process was finalized. CEA-Leti, which had previously outsourced certain 300 mm contact fabrication process steps to STMicroelectronics, can now complete these steps in house, shortening lead times on R&D projects for partners.
Top page