A novel PFIB sample preparation protocol for correlative 3D X-ray CNT and FIB-TOF-SIMS tomography
| Description | |
| Date | |
| Authors | Priebe A., Audoit G., Barnes J.-P. |
| Year | 2017-0143 |
| Source-Title | Ultramicroscopy |
| Affiliations | Univ. Grenoble Alpes, Grenoble, France, CEA, LETI, MINATEC Campus, Grenoble, France |
| Abstract | We present a novel sample preparation method that allows correlative 3D X-ray Computed Nano-Tomography (CNT) and Focused Ion Beam Time-Of-Flight Secondary Ion Mass Spectrometry (FIB-TOF-SIMS) tomography to be performed on the same sample. In addition, our invention ensures that samples stay unmodified structurally and chemically between the subsequent experiments. The main principle is based on modifying the topography of the X-ray CNT experimental setup before FIB-TOF-SIMS measurements by incorporating a square washer around the sample. This affects the distribution of extraction field lines and therefore influences the trajectories of secondary ions that are now guided more efficiently towards the detector. As the result, secondary ion detection is significantly improved and higher, i.e. statistically better, signals are obtained. © 2016 Elsevier B.V. |
| Author-Keywords | 3D correlative tomography, FIB-TOF-SIMS, Focused ion beam, Ion detection, Sample preparation, X-ray nano-tomography |
| Index-Keywords | Focused ion beams, Ion beams, Ions, Mass spectrometry, Organic polymers, Secondary emission, Tomography, 3d x-rays, Extraction fields, Ion detection, Sample preparation, Sample preparation methods, Secondary ions, Time of flight secondary ion mass spectrometry, ToF SIMS, Secondary ion mass spectrometry, Article, clinical protocol, controlled study, diagnostic imaging, focused ion beam time of flight secondary ion mass spectrometry tomography, image analysis, image processing, three dimensional imaging, three dimensional X ray computed nano tomography, time of flight mass spectrometry |
| ISSN | 3043991 |
| Link | Link |