CMOS compatible nanoscale thermal conductivity detector for gas sensing applications
| Description | |
| Date | |
| Authors | Legendre O., Ruellan J., Gely M., Arcamone J., Duraffourg L., Ricoul F., Alava T., Fain B. |
| Year | 2017-0331 |
| Source-Title | Sensors and Actuators, A: Physical |
| Affiliations | Univ. Grenoble Alpes, Grenoble, France, CEA, LETI, Minatec Campus, Grenoble, France |
| Abstract | We present a nanofabricated Thermal Conductivity Detector (nano-TCD), designed to be monolithically integrated with a CMOS technology compatible NEMS, in order to widen its analyte spectrum in the low molecular weight volatile organic compounds range. The nano-TCD uses arrays of silicon nano-wires, with 220 nm × 250 nm cross sections and 2 ?m suspension gap over the silicon bulk. In order to filter out the 1/f flicker noise produced by the silicon nanowires, we used a signal modulation technique based on the 3? method, thanks to the fast response time of the nano-TCD. Experimental results demonstrate detection of pentane and butane with a limit of detection of 60 ppm and 70 ppm respectively (mole fraction). © 2017 Elsevier B.V. |
| Author-Keywords | Gas detector, Nanowire, Thermal conductivity detector |
| Index-Keywords | CMOS integrated circuits, Gas detectors, Modulation, Nanowires, Silicon, Thermal conductivity of gases, Volatile organic compounds, Fast response time, Gas sensing applications, Limit of detection, Low molecular weight, Monolithically integrated, Signal modulations, Silicon nanowires, Thermal conductivity detectors, Thermal conductivity |
| ISSN | 9244247 |
| Link | Link |