MEMS with an embedded fluidic microchannel for sensitive weighing of liquid samples
| Description | |
| Date | |
| Authors | Hadji C., Virot L., Picard C., Baleras F., Agache V. |
| Year | 2017-0161 |
| Source-Title | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Affiliations | CEA, LETI, France, University Grenoble Alpes, Liphy, France |
| Abstract | This paper reports hollow MEMS plate oscillators for the characterization of liquid samples, with a one-fold improvement in both Q-factor and Allan deviation compared to previous alike structures, and fluidic constriction larger than 1?m. These new characteristics make the devices amenable for the first time to liquid weighing with a 100 Hz.(g.L-1)-1 sensitivity and a few g.L-1 detection floor. © 2017 IEEE. |
| Author-Keywords | |
| Index-Keywords | Liquids, Mechanics, Q factor measurement, Weighing, Allan deviation, Fluidic microchannels, Liquid sample, Q-factors, MEMS |
| ISSN | 10846999 |
| Link | Link |