You are here : Home > Simultaneous mode tracking for sensing applications with dual-mode heterodyne NEMS oscillator

Publications

Simultaneous mode tracking for sensing applications with dual-mode heterodyne NEMS oscillator

Published on 29 March 2018
Simultaneous mode tracking for sensing applications with dual-mode heterodyne NEMS oscillator
Description
 
Date 
Authors
Gourlat G., Sansa M., Jourdan G., Villard P., Sicard G., Hentz S.
Year2017-0103
Source-TitleProceedings of IEEE Sensors
Affiliations
Univ. Grenoble Alpes, Grenoble, France, CEA, LETI, MINATEC Campus, Grenoble, France
Abstract
We report the first experimental demonstration of a heterodyne self-oscillator operating simultaneously on the first and second mode of a silicon NEMS resonator. This architecture tackles the simultaneous monitoring of a doubly-clamped resonator's first two resonant modes required for real world applications in the field of biological mass sensing. This oscillator is based on a downmixing scheme where the NEMS motion-induced electrical signal around 25 MHz and 70 MHz is shifted down to few tens of kilohertz thus reducing the bandwidth constraint on electronics and limiting the feedthrough between the NEMS actuation and detection electrode. In this paper, we present the oscillator measurement results in open-loop and closed-loop, and we evaluate the frequency stability. When implemented on silicon this oscillator scheme will help to circumvent today's limited NEMS integration density mostly due to a bulky circuitry. © 2016 IEEE.
Author-Keywords
dual-mode, heterodyne, mass sensing, mass spectrometry, MEMS, NEMS, oscillator, resonator
Index-Keywords
Mass spectrometry, MEMS, NEMS, Oscillators (electronic), Resonators, Bandwidth constraint, Detection electrode, Dual modes, Experimental demonstrations, Integration density, Mass sensing, Sensing applications, Simultaneous monitoring, Heterodyning
ISSN19300395
LinkLink

Retour à la liste