Down to 15nm BOX: SOI extendability for planar fully depleted application beyond 22FD
| Description | |
| Date | |
| Authors | Schwarzenbach W., Allibert F., Le Royer C., Grenouillet L., Malaquin C., Bertrand-Giuliani C., Boedt F., Loubriat S., Michau C., Parissi D., Nguyen B.-Y. |
| Year | 2017-0094 |
| Source-Title | 2016 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2016 |
| Affiliations | Soitec, Parc Technologique des Fontaines, Bernin, France, CEA, LETI, MINATEC Campus, Grenoble, France |
| Abstract | [No abstract available] |
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| Link | Link |